Prior NX系列奈米傳感器

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產品介紹

INTRODUCTION >> Prior NX 系列奈米傳感器

Prior NX 系列奈米傳感器，採用電容微測量技術(Capacitance Micrometry) 進行非接觸式位置測量，確保極致的解析度與穩定性。

NanoSensor® 透過目標板 (Target) 與探測板 (Probe) 形成平行板電容(Parallel Plate Capacitor)，利用高精度電子控制器測量其間距，解析度可達7pm，並具備最大 1.25mm 量測範圍。

該傳感器具備頻率響應最高達 10kHz，線性誤差低至0.02%，確保超高精度的位置監測與動態穩定性。

由於採用非接觸式測量(Non-Contact Measurement)，NanoSensor® 完全無遲滯現象(Hysteresis-Free)，並且測量點不會產生功率損耗，使其適用於極高精度與長時間穩定性的應用需求。

Prior 奈米傳感器系列產品可提供最長五年的原廠保固 (請來電洽詢)

FEATURES >> [Product Name]

SPECIFICATIONS >> NanoSensors – NX Series

Parameter		Value			Units	Comments
Static physical
Variant		NXB Series	NXC Series	NXD Series
Active area		22.5	113	282	mm²
Material		AL SI	AL SI	AL SI		Note 1
Dynamic physical (Typical values)
Thermal drift		230 3	230 3	230 3	nm K ^-1	Note 2
Short range –S (10pF)	Range	20	100	250	μm
	Nominal scale factor	2	10	25	μm/V
	Noise	<0.001	<0.005	<0.013	nmrms Hz-1⁄2
	Linearity error	<0.08	<0.05	<0.06	%	Note 3
Long range –L (2pF)	Range	100	500	1,250	μm
	Nominal scale factor	10	50	125	μm/V
	Noise	<0.015	<0.075	<0.188	nmrms Hz-1⁄2
	Linearity error	<0.08	<0.03	<0.06	%	Note 3
Operating temperature	Controller	+10 to +50			ºC
Operating temperature	Sensor	+10 to +50			ºC
Storage temperature		0 to +70			ºC
Relative humidity		5 to 95 (non-condensing)			%
Operating pressure	-UHV	10^-9			T	Note 4

Notes

Aluminium (AL) and Super Invar (SI) material available on all variants. Alternative custom materials, e.g. Stainless Steel or Invar 36 can be used. Please consult Queensgate.
This is the thickness contribution only. It does not include the area effect.
Linearity error can be dominated by the parallelism of the sensor faces; particularly for short range sensors. Linearity for type 4 compact sensors will have an order of magnitude higher non-linearity.
Vacuum sensors should be baked out at 100 ºC for two days prior to installation for best vacuum compatibility.