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Queensgate Nanopositioning Devices & Sensors | Nanopositioning Stages | Prior
Prior NPS-X-28C 28微米載物台
28 Micron Stage
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| 產品說明 | ||
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NPS-X-28C最初是為高速，超精密MR磁頭和磁盤驅動器測試而開發。 體積小，響應時間毫秒級，對於高可靠性和高生產量應用的最佳選擇。低位移質量和高剛度提供了極高的頻寬。 電容式傳感器設計可在超過28微米的範圍內提供奈米級位移測量和閉環反饋。結合Queensgate的數位閉環控制器，NPS-X-28C可以實現毫秒級的響應和穩定時間。
應用領域
建議的控制器
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| 技術規格 |
| Parameter | Symbol | Value | Units | Comments |
| Static physical | ||||
| Material | Titanium | |||
| Size | 60 long x 40 wide x 15.5 high | mm | ||
| *Range | dxp·max | Minimum:± 14 | μm | |
| Scale factor | dxp·max | Typical:1 | μm | Note 1 |
| Scale factor error (1σ) | δbx1 | Typical:0.1 | % | |
| Resonant frequency: 0g load | Minimum:5.5 Typical:5.8 Maximum:6.2 | KHz | ||
| Maximum load | Maximum:10 | Kg | Note 2 | |
| Dynamic physical (Typical values) | ||||
| Note 3 | ||||
| *3dB Bandwidth | Bx·p | Fast:600 Medium:400 Slow:50 | Hz | |
| *Small signal settle time step 500nm | txs·s | Fast:<2 | ms | Note 4 |
| *Small signal settle time step 1um | txs·s | Fast:<9 | ms | Note 4 |
| *Position noise (1σ) Typical | δxp·n | Fast:<0.093 Slow:<0.07 | nmrms | Note 5 |
| Error terms | ||||
| *Hysteresis (peak to peak) | δxp·hyst | Typical:0.005 Maximum:0.01 | % | Note 6 |
| *Linearity error (peak) | δxp·lin | Typical:<0.007 Maximum:0.02 | % | Note 7 |
| *Rotational error | δφx | Typical:1 Maximum:5 | µradians | Note 8 |
| *Rotational error | δθx | Typical:1 Maximum:5 | µradians | Note 8 |
| *Rotational error | δγx | Typical:1 Maximum:5 | µradians | Note 8 |
| 產品資訊 |
